Semiconductor
The Semiconductor fabrication process is extremely aggressive and demands the best choice of sealing materials with the longest life time together with lowest contamination to assure the highest efficiency and yield levels possible.
Europe Seals supplies O-Rings and Molded Rubber parts (example : Door seals) for various products:
- Furnaces
- Pumps and Valves
- Product handling
- Process automation equipment
Possible seal materials for different semiconductor process steps
Wafer preparation (Crystal Growth)
- Silicone (High Temp)
- FEP Encapsualated Silikone
- *Perfluor (Black or White)
- FPM (Black or White)
- PTFE
Thermal Processes LPCVD and Oxidation
- Silcone (High Temp)
- FEP Encapsualated Silikone
- Perfluor (Black or White)
- FPM (Black or White)
- PTFE
EPI (Epitaxial Silicon)
- Silkone (High Temp)
- FEP Encapsualated Silikone
- Perfluor (Black or White)
- FPM (Black or White)
- PTFE
CVD (Chemical Vapor Dep)
- Perfluor (Black or White)
- FPM (Black or White)
PVD (Physical Vapor Dep)
- Perfluor (Black or White)
- FPM (Black or White)
Lithography
- Perfluor clear (see picture)
- FPM (Black or White)
- EPDM (Peroxide Cured)
Wet Etching
- FPM
- Perfluor Clear or Black
- FEP Encapsulated FPM or Silicone
- PTFE
Plasma Etching
- Perfluor White or Clear
- FPM White
Stripping
- Perfluor Clear or Black
- FPM
- Aflas
- EPDM (Peroxide Cured)
- FEP Encapsulated FPM or Silicone
- PTFE
Ashing
- Perfluor White or Clear
- Silicone (MVQ)
- FPM
- Fluor Silicone (FMVQ)
Material datasheets for downloading (PDF-files)
Perfluor Black (PDF)
Perfluor White (PDF)
Perfluor Clear (PDF)
*NOTE : All our Perfluor Materials are Clean room manufactured and packed
Go back
You can always call us for information on +31 (0)26 312 0773
Material
The manufacturing plants are producing products made out of various different rubber (metal bonded) materials, not only standard NBR, FPM, MVQ and EPDM but also EPT and a special EPDM rubber material used for water and heating applications.
The production plants are mixing their own rubber materials in order to control the complete production process from the beginning up to the finished product. Full product tracebility guaranteed!
Tools
All tools are developed and produced accoording to customer requirements in "house" tool shops. The advantages having a in "house" tool shops are; direct progress control, short communication lines ( important if modifications are required) but moreover: shortest possible lead times!
You can always call us for information on +31 (0)26 312 0773
